A-SI-H A-SIC-H WAVE-GUIDES AND MODULATORS FOR LOW-COST SILICON-INTEGRATED OPTOELECTRONICS/

Starting from an a-Si:H/a-SiC:H stack deposited by glow discharge on a crystal silicon wafer, we have fabricated and measured the properties of rib waveguides suitable for infrared optical communication purpose s. Propagation losses as small as 0.7 dB/cm have been measured. The sa me waveguiding structure has been utilised for the construction of Fab ry-Perot interferometers. As the process is compatible with the standa rd microelectronic technologies, the integration of optical and electr onic functions on the same chip becomes possible. (C) 1998 Elsevier Sc ience B.V. All rights reserved.