G. Cocorullo et al., A-SI-H A-SIC-H WAVE-GUIDES AND MODULATORS FOR LOW-COST SILICON-INTEGRATED OPTOELECTRONICS/, Journal of non-crystalline solids, 230, 1998, pp. 1118-1122
Starting from an a-Si:H/a-SiC:H stack deposited by glow discharge on a
crystal silicon wafer, we have fabricated and measured the properties
of rib waveguides suitable for infrared optical communication purpose
s. Propagation losses as small as 0.7 dB/cm have been measured. The sa
me waveguiding structure has been utilised for the construction of Fab
ry-Perot interferometers. As the process is compatible with the standa
rd microelectronic technologies, the integration of optical and electr
onic functions on the same chip becomes possible. (C) 1998 Elsevier Sc
ience B.V. All rights reserved.