The optical numerical simulator for multi-layer structures with textur
ed interfaces, GENPRO2, was improved and applied to determine the scat
tering parameters of textured interfaces of a-SiGe:H solar cells. A se
nsitivity study was carried out in which the relative effects of the v
arious scattering parameters of the interfaces on the quantum efficien
cy (QE) of the solar cells were investigated. The optical properties o
f the separate layers were determined and extrapolated to energies at
which they could not be measured accurately. A series of four a-SiGe:H
solar cells with various thicknesses of the intrinsic layer was grown
and their QE properties were measured. The contribution of the scatte
ring of the various interfaces was determined by matching the measured
and the simulated QE properties. The haze values of the transparent c
onductive oxide/p-doped layer (TCO/p) interface found by our simulatio
ns agree well with reports in the literature. In contrast to other mod
el results, we show that besides the scattering at the TCO/p- and n-do
ped layer/Ag interface, the scattering at the p/insulator and the insu
lator/n interface also has to be taken into account in calculating the
QE characteristics. (C) 1998 Elsevier Science B.V. All rights reserve
d.