STACKED A-SI-H-BASED 3-COLOR DETECTORS

A new a-Si:H based three colour-detector with the assembly transparent conducting oxide (TCO)/PINIP/TCO/PIN/metal is theoretically and exper imentally investigated. This detector assembly overcomes the problems with a thin PIN diode for the detection of the blue colour in the TCO/ PIN/TCO/PINIP/metal assembly. The theoretical results demonstrate the advantages of the new detector type. The three colours could be detect ed with full width half magnitude < 150 nm and colour suppressions of more than three between each colour. Experimentally, the spectral resp onses show the peak values at the demanded wavelengths, but exhibit an asymmetrical behaviour leading to full width half magnitudes larger t han the theoretical prediction. (C) 1998 Elsevier Science B.V. All rig hts reserved.