THE IMPROVEMENT ON BLUE-LIGHT EMISSION FROM HYDROGENATED AMORPHOUS-SILICON CARBIDE FILMS PREPARED FROM AN ORGANIC SOURCE

A series of hydrogenated amorphous silicon carbide (a-Si1-xCx:H) films (0 < x less than or equal to 1) was grown by using an organic source, xylene (C8H10), instead of methane (CH4) in a conventional plasma enh anced chemical vapor deposition system. The optical band gap of these samples was altered over a wide range by changing the gas ratio of C8H 10 to SiH4; the maximum ratio was 3.5 eV. Photoluminescence (PL) measu rements were carried out at room temperature by using a Xe lamp as an excitation light for samples deposited at different conditions. Contra ry to earlier reports, we found that the PL peak is blueshifted with i ncreasing optical band gap and the PL intensity increased. (C) 1998 El sevier Science B.V. All rights reserved.