OPTICAL INVESTIGATIONS OF THE MICROSTRUCTURE OF HYDROGENATED AMORPHOUS-CARBON FILMS

The electronic and vibrational properties of hydrogenated amorphous ca rbon (a-C:H) films deposited by a dual electron cyclotron resonance-ra dio frequency (ECR-RF) plasma technique from methane at different nega tive RF substrate bias voltages have been investigated by several comp lementary optical methods covering a wide spectral range (0.06 to 30 e V). The results as a whole are interpreted in terms of local C/C and C /H bonding configurations and their effects on the electronic states i ntroduced by the rr-bonded clusters. (C) 1998 Elsevier Science B.V. Al l rights reserved.