NOVEL ABLATION OF WIDE BAND-GAP MATERIALS BY MULTIWAVELENGTH EXCITATION USING A VUV-UV LASER SYSTEM

Novel ablation of wide band-gap materials by multiwavelength excitatio n using a VUV-UV laser system is demonstrated. Two different kinds of novel ablation techniques of fused quartz are developed, that is, (1) selective removal of VUV-pre-irradiated fused quartz followed by UV la ser irradiation (serial irradiation) and (2) direct patterning of fuse d quartz using a contact mask by simultaneous irradiation of VUV and U V laser beams (simultaneous irradiation). The mechanisms for each proc ess are discussed and the role of VUV beams only possessing small puls e energy is made clear.