A NEW METHOD FOR MEASURING SCATTERING OF LIGHT FROM OPTICAL-SURFACES WITH RANDOM ROUGHNESS

In this letter we report a new method for measuring light scattered fr om optically rough surfaces. By collecting scattered light in a given solid angle, the measurement system does not require a detection unit with an extremely large dynamic range. This in turn significantly simp lifies the system configuration. Measurements of scattering close to s pecular reflection (the so-called small angle or near-specular scatter ing) also can be completed without any difficulty. Unlike in the commo n angle resolved scattering (ARS) measurement system, in this system a linear movement instead of rotation is adopted to scan scattered ligh t. In this way, the angular resolution of scattering measurements is i ndependent of the resolution of the translation stages and may be adju sted.