The characterization of PdCuSi alloy films prepared by evaporation has
been examined by means of transmission electron microscopy. The evapo
ration-deposited alloy films are composed of nanocrystals and have fac
e-centered cubic structure. Several metastable phases are observed in
the annealed PdCuSi alloy films, and their structures have been determ
ined by electron diffraction patterns. The structural parameter of the
formed phases is affected by the component of the constituent phase.
(C) 1998 Elsevier Science S.A.