Raman spectroscopy is an excellent technique for characterization of t
he crystalline quality of diamond films and the amount of graphite and
amorphous carbon impurities in them. Most publications on diamond inc
lude Raman spectra to show the quality of the films through a measurem
ent of the bandwidth (FWHM) of the feature at ca. 1332.5 cm(-1) charac
teristic of diamond. These measurements are often done directly on the
spectra without correcting them for the instrumental contribution to
the bandwidth. This can lead to meaningless comparisons of diamond ban
dwidth measurements across research groups. In order to show to what e
xtent interpretations based on such raw measurements can be misled, we
have characterized five CVD diamond films and a natural type IIa diam
ond using four different sets of instrumental parameters. We present a
fitting procedure to obtain the Raman bandwidth corresponding to the
material under study independent of the experimental parameters. This
method permits absolute comparisons among Raman bandwidths obtained un
der different experimental conditions, providing they are corrected fo
r the instrumental contribution. (C) 1998 Elsevier Science S.A.