SURFACE CLEANING USING ENERGETIC MICROCLUSTER BEAMS

Authors
MAHONEY JF PEREL J SUJO C ANDERSEN JC
Citation
Jf. Mahoney et al., SURFACE CLEANING USING ENERGETIC MICROCLUSTER BEAMS, Solid state technology, 41(7), 1998, pp. 149
Citations number
10
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
41
Issue
7
Year of publication
1998
Database
ISI
SICI code
0038-111X(1998)41:7<149:SCUEMB>2.0.ZU;2-0
Abstract
A new in situ vacuum surface-cleaning process uses microcluster beams formed by electrohydrodynamic emission from capillaries to clean surfa ces contaminated by solid particulates and organic films. Proposed sur face-cleaning mechanisms include a model based on transfer of impulsiv e forces during collisions between microclusters and solid particles. Microschocks induced in thin contaminant films during microcluster imp act are also discussed.