USING A WEB INTRANET FOR FAB DATA DISTRIBUTION

Practically applied Web technology on an intranet has proven to be fea sible and advantageous in a semiconductor materials production environ ment. The system provides data and information management, including d ata acquisition, processing, distribution, and work tracking. This mod el application includes classic data distribution via static Web pages , and dynamic interactive information exchange in real time between me trology instruments and a database via the Web server. As such, Web te chnology offers many advantages, including low installation and mainte nance costs, and easy integration of text, graphics, and binary data f ormats. Further, the system provides flexibility because it is not dep endent on a given workstation platform or network.