MICROMACHINED METHANE SENSOR-BASED ON LOW-RESOLUTION SPECTRAL MODULATION OF IR ABSORPTION RADIATION

Authors
SILVEIRA JP ANGUITA J BRIONES F GRASDEPOT F BAZIN A
Citation
Jp. Silveira et al., MICROMACHINED METHANE SENSOR-BASED ON LOW-RESOLUTION SPECTRAL MODULATION OF IR ABSORPTION RADIATION, Sensors and actuators. B, Chemical, 48(1-3), 1998, pp. 305-307
Citations number
5
Categorie Soggetti
Electrochemistry,"Chemistry Analytical","Instument & Instrumentation
Journal title
Sensors and actuators. B, Chemical → ACNP
ISSN journal
09254005
Volume
48
Issue
1-3
Year of publication
1998
Pages
305 - 307
Database
ISI
SICI code
0925-4005(1998)48:1-3<305:MMSOLS>2.0.ZU;2-S
Abstract
We present a new methane sensor based on infrared absorption at 3.3 mu m. We have designed a modulable interferencial filter to achieve suff icient selectivity and to eliminate drift and changes on transmission of optical elements or IR light source emission. This microoptical dev ice is fabricated using materials and processes available from silicon technology, thus assuring low production cost. (C) 1998 Elsevier Scie nce S.A. All rights reserved.