A. Talneau et al., LOW-DAMAGE DRY-ETCHED GRATING ON AN MQW ACTIVE LAYER AND DISLOCATION-FREE INP REGROWTH FOR 1.55-MU-M COMPLEX-COUPLED DFB LASERS FABRICATION, IEEE photonics technology letters, 10(8), 1998, pp. 1070-1072
A grating dry-etched through the upper wells of a multiquantum-well ac
tive layer has been characterized before and after regrowth. TEM obser
vation and carrier lifetime measurements have shown growth-free defect
s of the epitaxial layers, As a consequence, quasi-100% monomode oscil
lation on lambda + 1 mode has been achieved on complex-coupled distrib
uted-feedback lasers fabricated with such grating.