Strain distribution in Si-on-sapphire (SOS) heterostructure was assess
ed using the experimentally determined in-plane and out-of-plane strai
n values. The calculation is performed in the frame of the biaxial str
ain model. Similar strain distributions were observed for the SOS samp
les obtained from different sources. (C) 1998 Elsevier Science B.V. Al
l rights reserved.