IN-SITU TIME-OF-FLIGHT LASER-INDUCED FLUORESCENCE SPECTROSCOPY OF CARBON BY PULSED-LASER DEPOSITION

This research focuses on relating observed plume characteristics of pu lsed laser deposition (PLD) of diamond-like carbon (DLC) to the result ing material chemistry. Observed process parameters ultimately determi ne the deposited film mechanical properties. Preliminary studies on la ser induced florescence of carbon by PLD showed unusual velocity profi les when observed with a time of flight laser induced florescence (LIF ) optical emission spectrometer (OES), Further investigation of spectr al emission temporal characteristics was performed to reveal interacti on between the substrate and laser plume, with an increase in species energy at the substrate. Species velocities and other non-uniformities were also observed at the target and substrate with respect to the la ser spot position on the target. Plume ion velocity and density distri bution were found to be asymmetrical and non-uniform, creating stratif ied film structures. (C) 1998 Elsevier Science S.A.