RAMAN STUDIES OF TETRAHEDRAL AMORPHOUS-CARBON FILMS DEPOSITED BY FILTERED CATHODIC VACUUM-ARC

Authors
TAY BK SHI X TAN HS YANG HS SUN Z
Citation
Bk. Tay et al., RAMAN STUDIES OF TETRAHEDRAL AMORPHOUS-CARBON FILMS DEPOSITED BY FILTERED CATHODIC VACUUM-ARC, Surface & coatings technology, 105(1-2), 1998, pp. 155-158
Citations number
19
Categorie Soggetti
Materials Science, Coatings & Films
Journal title
Surface & coatings technology → ACNP
ISSN journal
02578972
Volume
105
Issue
1-2
Year of publication
1998
Pages
155 - 158
Database
ISI
SICI code
0257-8972(1998)105:1-2<155:RSOTAF>2.0.ZU;2-E
Abstract
Raman spectra of tetrahedral amorphous carbon (ta-C) films have been o btained as a function of impinging carbon ion energy. In order to anal yze the spectra quantitatively, the Raman spectra were fitted using a least-squares computer program. The relative Raman intensity is found to decrease with increasing sp(3)/sp(2) bonding ratio in the films. In particular, the parameters from the fits show a strong correlation be tween the relative intensity ratio and the sp(3) fraction. (C) 1998 El sevier Science S.A.