MULTIBEAM MIXING IMPLANTATION SYSTEM AND ITS APPLICATIONS

A new apparatus for materials modification named multi-beam mixing imp lantation system was built. Seven kinds of beams, including three kind s of ion beams with the energies of 100, 40 and 5 keV, two vacuum are plasma deposition beams, an electron beam, and a sputtered atom beam w ere designed in the system. The beam lines can be controlled independe ntly. Some processing technologies for materials modification such as ion beam dynamic mixing with stoichiometric composition, ion implantat ion and ion beam dynamic mixing assisted by an electron beam irradiate d, and ion beam assisted deposition can be achieved in the system. As the applications of the system, TiN coatings with excellent performanc e in corrosion resistance, hardness, etc. were synthesized and a polym er film with a special heat transfer in steam condensation - dropwise condensation - was fabricated. (C) 1998 Elsevier Science S.A.