EFFECT OF COLLISIONLESS HEATING ON ELECTRON-ENERGY DISTRIBUTION IN ANINDUCTIVELY-COUPLED PLASMA

Authors
GODYAK VA KOLOBOV VI
Citation
Va. Godyak et Vi. Kolobov, EFFECT OF COLLISIONLESS HEATING ON ELECTRON-ENERGY DISTRIBUTION IN ANINDUCTIVELY-COUPLED PLASMA, Physical review letters, 81(2), 1998, pp. 369-372
Citations number
19
Categorie Soggetti
Physics
Journal title
Physical review letters → ACNP
ISSN journal
00319007
Volume
81
Issue
2
Year of publication
1998
Pages
369 - 372
Database
ISI
SICI code
0031-9007(1998)81:2<369:EOCHOE>2.0.ZU;2-P
Abstract
Significant frequency dependence of the electron energy distribution h as been found in a low-pressure inductive discharge experiment. The ob served frequency dependence reveals The presence of collisionless elec tron heating and appears as a result of finite electron-transit time t hrough the skin layer. The energy distributions;calculated from a kine tic equation accounting for nonlocality of electron kinetics and elect rodynamics are in good agreement with the experiment.