Cl. Chang et al., EFFECTIVE-MASS MEASUREMENT IN 2-DIMENSIONAL HOLE GAS IN STRAINED SI1-X-YGEXCY SI(100) MODULATION-DOPED HETEROSTRUCTURES/, Thin solid films, 321, 1998, pp. 51-54
A two-dimensional hole gas in the Si1-x-yGexCy channel on a Si(100) su
bstrate has been demonstrated at temperatures from 0.3 to 300 K. The h
ole mobility decreases as more C is added. The hole effective mass has
also been measured based on the analysis of the temperature dependenc
e of Shubnikov-de Haas oscillations. It is found that the addition of
C, up to 0.6%, does nor change the effective mass of holes in Si1-xGex
. It suggests that the valence band structure of Si1-x-yGexCy is simil
ar to that of Si1-xGex. (C) 1998 Elsevier Science S.A. All rights rese
rved.