Single crystals of diamond were irradiated with carbon ions up to inte
gral fluences of about 10(17) C/cm(2). In order to produce homogeneous
damage profiles over a depth of 1 mu m the samples were exposed to ca
lculated sequences of irradiation energies and areal doses. The concom
itant evolution of radiation damage was monitored by various technique
s including optical absorption and reflection spectrometry, Raman scat
tering and ion backscattering/channelling measurements. The phase tran
sition crystalline to amorphous is completed in the vicinity of 5 x 10
(16) C/cm(2). At this irradiation level, the composition of the damage
d layer is mainly made up by amorphous diamond with a minor fraction o
f a graphitic component, as most clearly seen in the Raman spectra. (C
) 1998 Elsevier Science S.A. All rights reserved.