QUANTITATIVE TRANSMISSION ELECTRON-MICROSCOPY WITH IMAGING PLATES

Recent quantitative transmission electron microscopy (TEM) performed w ith imaging plates was reviewed according to the experimental results obtained by the author and his colleagues. First of all, characteristi cs of imaging plates for high-energy electrons, such as S/N and DQE we re discussed. Taking account of the characteristics and by combining t he imaging plate system with the computer network system, quantitative analysis of high-resolution electron microscope (HREM) images and ele ctron diffraction patterns could be extensively carried out. In the an alysis of HREM images, residual indices between observed and calculate d images of W8Ta2O29 were evaluated to determine the experimental cond itions accurately. As an example of the analysis of electron diffracti on patterns, the change of the thermal diffuse scattering of an Au thi n film was accurately evaluated as a function of temperature. Finally the weak diffuse scattering in Gao(0.47)In(0.53)As was analyzed by uti lizing an energy filter to remove the background due to the plasmon sc attering.