AUGER SPECTROSCOPIC INVESTIGATION OF A-C-H FILMS ON SILICON MICRORELIEF SUBSTRATES

Hydrogenated amorphous carbon films (a-C:H) grown on unheated Si with and without microrelief morphology substrates (MRS, FS) by chemical va por deposition were investigated using scanning electron microscopy, A uger electron spectroscopy analysis and reflection electron diffractio n methods. A difference in the Auger spectra was found in the dependen ce on the surface morphology of the substrate, the microrelief type an d the film thickness. Auger line shapes similar to those for diamond w ere observed in the form of tetragonal pyramids when a-C:H films were grown on microrelief Si substrates. (C) 1998 Elsevier Science Ltd. All rights reserved.