IR LASER-INDUCED CHEMICAL-VAPOR-DEPOSITION OF CARBONACEOUS PHASES FROM 3-BUTYN-2-ONE

Authors
DRINEK V URBANOVA M BASTL Z GREGORA I VORLICEK V SUBRT J POLA J
Citation
V. Drinek et al., IR LASER-INDUCED CHEMICAL-VAPOR-DEPOSITION OF CARBONACEOUS PHASES FROM 3-BUTYN-2-ONE, Carbon (New York), 36(5-6), 1998, pp. 521-524
Citations number
21
Categorie Soggetti
Chemistry Physical","Material Science
Journal title
Carbon (New York) → ACNP
ISSN journal
00086223
Volume
36
Issue
5-6
Year of publication
1998
Pages
521 - 524
Database
ISI
SICI code
0008-6223(1998)36:5-6<521:ILCOCP>2.0.ZU;2-Y
Abstract
CO2 laser induced decomposition of 3-butyn-2-one in the gas phase resu lts in the deposition of carbonaceous films composed of a graphitic an d monohydrogenated carbon, in which H is dominantly bonded to sp(3) si tes. The films incorporate oxygen in superficial layers. The technique is suitable for preparation of thin C-based films at low substrate te mperatures. (C) 1998 Elsevier Science Ltd. All rights reserved.