CHARACTERIZATION OF THE FLUXES OF NEUTRAL AND POSITIVELY CHARGED CLUSTERS (AGN AND AGN-LESS-THAN-OR-EQUAL-TO-4) PRODUCED BY ARGON ION SPUTTERING OF SILVER( N)

Citation
K. Franzreb et al., CHARACTERIZATION OF THE FLUXES OF NEUTRAL AND POSITIVELY CHARGED CLUSTERS (AGN AND AGN-LESS-THAN-OR-EQUAL-TO-4) PRODUCED BY ARGON ION SPUTTERING OF SILVER( N), Zeitschrift fur Physik. D, Atoms, molecules and clusters, 26, 1993, pp. 101-103
Citations number
35
Categorie Soggetti
Physics, Atomic, Molecular & Chemical
ISSN journal
01787683
Volume
26
Year of publication
1993
Supplement
S
Pages
101 - 103
Database
ISI
SICI code
0178-7683(1993)26:<101:COTFON>2.0.ZU;2-B
Abstract
The emission of neutral and positively charged silver clusters during sputtering of a polycrystalline silver target by 5 keV Ar+ ion bombard ment has been studied and the sputter ejected silver flux has been cha racterized. As a result, the silver flux is found to be strongly domin ated by neutral clusters rather than cluster ions. The contribution of neutral clusters in the overall silver flux decreases rapidly and mon otonically with increasing cluster size n and decreases, in addition, with decreasing bombarding energy. The well known alternation of the s econdary ion intensities of Ag(n)+ as a function of cluster size (high er intensities for odd n) is found to be correlated with the effective ''ionization potentials'' of the corresponding sputtered neutral clus ters.