CHARACTERIZATION OF THE FLUXES OF NEUTRAL AND POSITIVELY CHARGED CLUSTERS (AGN AND AGN-LESS-THAN-OR-EQUAL-TO-4) PRODUCED BY ARGON ION SPUTTERING OF SILVER( N)
K. Franzreb et al., CHARACTERIZATION OF THE FLUXES OF NEUTRAL AND POSITIVELY CHARGED CLUSTERS (AGN AND AGN-LESS-THAN-OR-EQUAL-TO-4) PRODUCED BY ARGON ION SPUTTERING OF SILVER( N), Zeitschrift fur Physik. D, Atoms, molecules and clusters, 26, 1993, pp. 101-103
The emission of neutral and positively charged silver clusters during
sputtering of a polycrystalline silver target by 5 keV Ar+ ion bombard
ment has been studied and the sputter ejected silver flux has been cha
racterized. As a result, the silver flux is found to be strongly domin
ated by neutral clusters rather than cluster ions. The contribution of
neutral clusters in the overall silver flux decreases rapidly and mon
otonically with increasing cluster size n and decreases, in addition,
with decreasing bombarding energy. The well known alternation of the s
econdary ion intensities of Ag(n)+ as a function of cluster size (high
er intensities for odd n) is found to be correlated with the effective
''ionization potentials'' of the corresponding sputtered neutral clus
ters.