FILMS OF CONTROLLED NANOSIZE GRAINS DEPOSITED BY LOW-ENERGY CLUSTER BEAM

Authors
FUCHS G MELINON P YAN Y CABAUD B HOAREAU A TREILLEUX M PAILLARD V
Citation
G. Fuchs et al., FILMS OF CONTROLLED NANOSIZE GRAINS DEPOSITED BY LOW-ENERGY CLUSTER BEAM, Zeitschrift fur Physik. D, Atoms, molecules and clusters, 26, 1993, pp. 249-251
Citations number
18
Categorie Soggetti
Physics, Atomic, Molecular & Chemical
Journal title
Zeitschrift fur Physik. D, Atoms, molecules and clusters → ACNP
ISSN journal
01787683
Volume
26
Year of publication
1993
Supplement
S
Pages
249 - 251
Database
ISI
SICI code
0178-7683(1993)26:<249:FOCNGD>2.0.ZU;2-I
Abstract
Effects of low-energy cluster beam deposition (LECBD) on the growth of thin films are presented. According to TEM results, LECBD antimony fi lms are the result of random packing of the incident clusters. We show that the ''pavement of the surface substrate'' previously observed in the first stage of film growth is still a valid model for thick films . With low compactness and the high roughness which characterize LECBD films, specific applications are suggested.