The initial permeability of NiFe single layer films and single and mul
ti-layer FeAlN films up to 500 MHz are presented. The permeability of
thin (<1500 Angstrom) NiFe and FeAlN films were fit with calculations
based on the Landau-Lifshitz/Gilbert model for phenomenological dampin
g, using damping factors of similar to 0.016 and similar to 0.026, res
pectively. Transverse bias permeability measurements identified larger
ripple fields in FeAlN samples compared to those in thin NiFe samples
. The permeability of similar to 2 mu m thick NiFe and FeAlN films wer
e well described by eddy current theory. The permeability roll off fre
quency of 2 mu m thick patterned FeAlN films increased from 20 to 200
MHz when laminated into 32 layers separated by 25 Angstrom thick SiN i
nterlayers.