EFFECTS OF ECR ION SHOWER TREATMENT ON THE MAGNETIC AND RECORDING PROPERTIES OF COCRTAPT THIN-FILM MEDIA

The elecotron-cyclotron- resonance (ECR) microwave plasma nitrogen or oxygen ions shower treatment on the NiP/Al substrates before sputterin g leads to an increase in coercivity of CoCrTaPt/Cr isotropic media an d a decrease in coercivity and OR of oriented media. And also we found that the medium noise and NLTS of the media become lower by using the substrates with ion shower treatment. The study of magnetic propertie s and microstructure of the media with and without ion shower treatmen t suggested that the improvement of the magnetic and recording propert ies of the CoCrTaPt/Cr films was owing likely to the decrease in the i ntergranular magnetic coupling and the uniformity of the magnetic anis otropy. X-ray photoelectron spectroscopy (XPS) analysis indicated that the increase of the structural feature of N-H and N-O contributed to the improvement of them.