NANOMECHANICAL PROPERTIES OF CNX OVERCOATS AND CATHODIC ARC CARBON(CAC) FILMS

Authors
HSIAO RC BOGY DB BHATIA CS
Citation
Rc. Hsiao et al., NANOMECHANICAL PROPERTIES OF CNX OVERCOATS AND CATHODIC ARC CARBON(CAC) FILMS, IEEE transactions on magnetics, 34(4), 1998, pp. 1720-1722
Citations number
10
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied
Journal title
IEEE transactions on magnetics → ACNP
ISSN journal
00189464
Volume
34
Issue
4
Year of publication
1998
Part
1
Pages
1720 - 1722
Database
ISI
SICI code
0018-9464(1998)34:4<1720:NPOCOA>2.0.ZU;2-7
Abstract
The nano-wear behavior of nitrogenated carbon films that were deposite d on disks at various bias was studied. It was found that the depositi on bias played an important role in determining nanomechanical propert ies of CNx films. Nanoindentation and wear tests were also performed o n a Cathodic Are Carbon (CAC) film for which the mechanical properties vary along the thickness direction.