HIGH WEAR DURABILITY OF ECR-SPUTTERED CARBON-FILMS

Authors
HIRONO S UMEMURA S ANDOH Y HAYASHI T KANEKO R
Citation
S. Hirono et al., HIGH WEAR DURABILITY OF ECR-SPUTTERED CARBON-FILMS, IEEE transactions on magnetics, 34(4), 1998, pp. 1729-1731
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied
Journal title
IEEE transactions on magnetics → ACNP
ISSN journal
00189464
Volume
34
Issue
4
Year of publication
1998
Part
1
Pages
1729 - 1731
Database
ISI
SICI code
0018-9464(1998)34:4<1729:HWDOEC>2.0.ZU;2-#
Abstract
We investigated the effect of ion irradiation on the wear of carbon fi lms prepared by electron-cyclotron-resonance plasma (ECR) sputtering. The wear durability of the ECR-sputtered films was far superior to tha t of the RF-sputtered films. ECR- sputtered films made with a high ene rgy ion irradiation showed the highest wear resistance, nearly equal t o that of bulk diamond. We attribute this high durability to selective etching;of the weakly bonded carbon atoms by the high-energy ion irra diation.