NANOLITHOGRAPHIC PATTERNING OF THIN METAL-FILMS WITH A SCANNING PROBEMICROSCOPE

Authors
MELINTE S NYSTEN B BAYOT V
Citation
S. Melinte et al., NANOLITHOGRAPHIC PATTERNING OF THIN METAL-FILMS WITH A SCANNING PROBEMICROSCOPE, Superlattices and microstructures, 24(1), 1998, pp. 79-82
Citations number
9
Categorie Soggetti
Physics, Condensed Matter
Journal title
Superlattices and microstructures → ACNP
ISSN journal
07496036
Volume
24
Issue
1
Year of publication
1998
Pages
79 - 82
Database
ISI
SICI code
0749-6036(1998)24:1<79:NPOTMW>2.0.ZU;2-V
Abstract
Using an atomic force microscope (AFM) operating in air, we locally mo dify thin films of e-beam-deposited Cr and Ti by applying voltage puls es between the AFM tip and the sample, which is positively biased with respect to the tip. The modifications consist in anodization and/or m echanical deformation and reach the metal/substrate interface. Metalli c gates can thus be fabricated without pattern transfer. (C) 1998 Acad emic Press.