A novel mechanism for the growth on crystalline surfaces under low sup
ersaturation, namely, induced by the presence of point defects, is pro
posed and studied. More precisely, we use ab initio minimization techn
iques to calculate the potential-energy surface for a series of adatom
s sequentially deposited on the Si(100)2 x 1 surface in the presence,
beneath the top layer, of a vacancy. We find that, indeed, this defect
can act as a growth site for the crystal: the energy at the defect is
about 1 eV lower than the lowest point of the perfect surface. Adatom
s aggregate near the defect and form the nucleus of subsequent growth.