EMISSION OF SECONDARY IONS FROM 3D, 4D, AND 5D TRANSITION-METALS UNDER CHLORO-TRIFLUORO-METHANE CCLF3 AS REACTANT GAS

Surface interactions of CClF3 with polycrystalline samples of Ti, V, C r, Mn, Fe, Co, Ni, Cu, Nb, Mo, Ph, Pd, Ag, Ta, W, Re, Ir, and Pt were investigated by means of moderate dynamic SIMS. As observed with other reactant gases these transition metals in most cases appear to be dis cernible into ''dissociative'' and (partial) ''molecular'' adsorbents. Small signals of oxidic secondary ions which are detectable for resid ual gas conditions vanished under the action of CClF3. However, due to strong polarization by either of the halogens, the emission of Me2+ i ons is enhanced for Ti, V, and Nb.