DIAMOND TIP ARRAYS FOR PARALLEL LITHOGRAPHY AND DATA-STORAGE

We propose a device capable of massively parallel nanoscale lithograph y and data storage due to a uniform array of diamond tips. A prototype device is constructed and demonstrated by forming patterns on silicon wafer surfaces. In our initial study, surface layers on silicon an se lectively removed in parallel by mechanical ablation and microsized ca rbon islands are deposited in air. Nearly all the lithographic and dat a storage techniques derived from proximal probe techniques are expect ed to benefit from the diamond tip array method.