ELECTRICAL-PROPERTIES OF PLASMA-POLYMERIZED C-H FILMS

Ac electrical properties of the dielectric part-hard hydrocarbon plasm a polymer C: H of the composite Ag/C: H prepared by an unbalanced magn etron were investigated. Capacitance and dielectric losses tg 6 of the C:H film sandwiched between the two Al thin film electrodes and measu red without breaking vacuum at a single frequency (1592 Hz) decreased considerably with time. In addition ac conductivity of the C: H film w ithin 10 min after its deposition was measured in the frequency range 10-10(4) Hz. An explanation in terms of post deposition trapped free r adical reactions resulting in their decay is given. This is supported by FTIR absorption measurements. (C) 1998 Elsevier Science Ltd. All ri ghts reserved.