SURFACE-STRUCTURE OF METAL-CONTAINING PLASMA-POLYMERIZED THIN-FILMS BY SCANNING FORCE MICROSCOPY

Authors
LEHMBERG H BIEDERMAN H SLAVINSKA D STUNDZIA V
Citation
H. Lehmberg et al., SURFACE-STRUCTURE OF METAL-CONTAINING PLASMA-POLYMERIZED THIN-FILMS BY SCANNING FORCE MICROSCOPY, Vacuum, 50(1-2), 1998, pp. 27-30
Citations number
7
Categorie Soggetti
Physics, Applied","Material Science
Journal title
Vacuum → ACNP
ISSN journal
0042207X
Volume
50
Issue
1-2
Year of publication
1998
Pages
27 - 30
Database
ISI
SICI code
0042-207X(1998)50:1-2<27:SOMPTB>2.0.ZU;2-G
Abstract
In addition to surface topography contact mode scanning force microsco py can provide locally resolved information on surface forces and elec trical charging behaviour. These methods are applied to molybdenum con taining plasma-polymerized thin films which during deposition have bee n subjected to energetic ion bombardment. Ifs influence on surface top ography will be confirmed whereas a change of surface forces cannot un iquely be attributed to it. (C) 1998 Elsevier Science Ltd. All rights reserved.