ELECTRONS ELASTICALLY BACKSCATTERED FROM AL, AG AND AU SAMPLES

The objective of this study is to exhibit the capability of Monte-Carl o simulation in the frame of surface spectroscopy using elastically re flected electrons. Our computer programme is based on sample descripti ons as stackings of atomic layers. Results allow us information on imp ortant parameters as the penetration depth of the electron beam or ang ular reflections. The programme has the capability for performing 3 D mapping of the backscattered electrons. Measurements of the percentage of the reflected current are depending on the geometry of the analysi s system. This can be shown by the relief of the three dimensional pat terns. (C) 1998 Published by Elsevier Science Ltd. All rights reserved .