V. Narayanan et al., GROWTH OF GALLIUM-PHOSPHIDE LAYERS BY CHEMICAL BEAM EPITAXY ON OXIDE PATTERNED (001)SILICON SUBSTRATES, Materials science & engineering. B, Solid-state materials for advanced technology, 54(3), 1998, pp. 207-209
GaP layers grown by chemical beam epitaxy in [110] channels fabricated
on oxide-patterned (001)silicon substrates have been examined in cros
s-section by conventional and high resolution transmission electron mi
croscopy. Results indicate that the layers are single crystalline. For
the imaging conditions used, [110] cross-sectional micrographs show t
hat growths in contact with the oxide exhibit twinning on one edge-on
variant, whereas faults or twins are observed on two such variants in
the layers which nucleate on the silicon substrate. Arguments for rati
onalizing these observations are developed, and their implications to
improve the quality of the layer by confining faults or twins by the o
xide sidewall are discussed. (C) 1998 Elsevier Science S.A. All rights
reserved.