INTEGRATED ARRAY OF GAS SENSORS

Authors
ANISIMKIN VI KRYSTAL RG MEDVED AV VERONA E ZEMLYAKOV VE
Citation
Vi. Anisimkin et al., INTEGRATED ARRAY OF GAS SENSORS, Electronics Letters, 34(13), 1998, pp. 1360-1361
Citations number
10
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
34
Issue
13
Year of publication
1998
Pages
1360 - 1361
Database
ISI
SICI code
0013-5194(1998)34:13<1360:IAOGS>2.0.ZU;2-4
Abstract
A new surface acoustic wave multi-channel sensor array suitable for pa ttern recognition purposes has been implemented and tested on an ST-cu t quartz substrate using one single palladium sorbent film for all the channels. The different response of each channel towards the same gas components is provided by the dependence of the mechanical displaceme nt components of the acoustic wave on the propagation direction.