Sw. Wang et Sf. Guo, PARALLEL SIMULATION OF ION-IMPLANTATION FOR MULTICOMPONENT TARGETS USING BOLTZMANN TRANSPORT-EQUATION, JPN J A P 2, 37(7A), 1998, pp. 781-783
A stepwise Boltzmann transport equation (BTE) simulation using non-uni
form energy grid momentum matrix and exact nuclear scattering cross-se
ction is successfully parallelized.to simulate the ion implantation of
multi-component targets. Assuming that the interactions of ion with d
ifferent target atoms are independent, the scattering of ions with dif
ferent components can be calculated concurrently by different processo
rs. It is developed on CONVEX SPP-1000 and the software environment of
parallel virtual machine (PVM) with a master-slave paradigm. A speedu
p of 3.3 has been obtained for the simulation of As ions implanted int
o AZ1350 (C6.2H6O1N0.15S0.06) which is composed of five components. In
addition, our new scheme gives better agreement with the experimental
results for heavy ion implantation than the conventional method using
a uniform energy grid and approximated scattering function.