PARALLEL SIMULATION OF ION-IMPLANTATION FOR MULTICOMPONENT TARGETS USING BOLTZMANN TRANSPORT-EQUATION

A stepwise Boltzmann transport equation (BTE) simulation using non-uni form energy grid momentum matrix and exact nuclear scattering cross-se ction is successfully parallelized.to simulate the ion implantation of multi-component targets. Assuming that the interactions of ion with d ifferent target atoms are independent, the scattering of ions with dif ferent components can be calculated concurrently by different processo rs. It is developed on CONVEX SPP-1000 and the software environment of parallel virtual machine (PVM) with a master-slave paradigm. A speedu p of 3.3 has been obtained for the simulation of As ions implanted int o AZ1350 (C6.2H6O1N0.15S0.06) which is composed of five components. In addition, our new scheme gives better agreement with the experimental results for heavy ion implantation than the conventional method using a uniform energy grid and approximated scattering function.