A technique for incorporating a groove into a LiNbO3 substrate is desc
ribed. Both V grooves for fiber alignment and vertical grooves for wav
eguide end-face formation can be fabricated with this technique. The p
roposed fabrication method is based on an excimer-laser ablation and a
high-speed rotation saw cut for LiNbO3. The former process provides a
variety of cross-sectional groove shapes by changing the ablation mas
k shape of LiNbO3, and the latter provides an optical-quality cutting
face. The proposed fabrication method is simple and provides low-cost
optical platforms not only for LiNbO3 but also for glasses, polymers,
and semiconductors. (C) 1998 Optical Society of America.