Diamond growth using CO-H-2 and CO-O-2-H-2 as input gases was studied
based on the non-equilibrium thermodynamic coupling model. The phase d
iagrams of diamond growth with different content of oxygen in the reac
tion system were calculated. The diagrams have diamond growth regions,
which were different from the diagrams based on classical equilibrium
thermodynamics, Also, the diamond growth regions at different system
pressures and different contents of oxygen were discussed in this pape
r. These results can guide the experimental study on diamond growth at
low-pressure because the theoretical phase diagrams coordinate very w
ell with the experimental results which had been published.