DETERMINATION OF THE GEOMETRY OF MICROHARDNESS INDENTERS WITH A SCANNING FORCE MICROSCOPE

Authors
HASCHE K HERRMANN K POHLENZ F THIELE K
Citation
K. Hasche et al., DETERMINATION OF THE GEOMETRY OF MICROHARDNESS INDENTERS WITH A SCANNING FORCE MICROSCOPE, Measurement science & technology, 9(7), 1998, pp. 1082-1086
Citations number
9
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement science & technology → ACNP
ISSN journal
09570233
Volume
9
Issue
7
Year of publication
1998
Pages
1082 - 1086
Database
ISI
SICI code
0957-0233(1998)9:7<1082:DOTGOM>2.0.ZU;2-B
Abstract
In this paper, experience gathered during the measurement of the geome try of microhardness indenters using a scanning force microscope is di scussed. Reasonable accuracy of the geometrical parameters of a microh ardness indenter can be obtained only if the scanning force microscope has been calibrated. The effect of the geometrical deviations on the result measured for the universal hardness is discussed.