Three types of monatomic steps are observed on the (110) cleavage surf
ace of InAs, with edges parallel to the (110), (111), and (112) direct
ions. The (110)-type steps have unserrated edges, but the (111) and (1
12) step edges are sometimes serrated, with periodicities of 9.8 +/- 0
.8 and 6.7 +/- 0.8 angstrom, respectively. Models of all three step ty
pes are presented: the edges of the (110) steps are unserrated because
no new dangling bonds are introduced by such steps; the serrated (111
) and (112) step edges are associated with dimerization of surface ani
ons.