CONTINUUM X-RAY SOURCE AS A CALIBRATION SYSTEM FOR CHARGE-COUPLED-DEVICES

We present x-ray spectra obtained by a charge coupled device (CCD) fro m an electron impacting x-ray source using several kinds of electron t argets: Au, Al-bronze, Al, and pure Al. The x rays from the source are dispersed by a grating and the dispersed x rays are focused on the CC D. Owing to the fine spatial and moderate energy resolutions of the CC D, fine spectra with 2 eV energy resolution up to 2.2 keV are obtained . X rays from the purl Al target (99.999% purity) provide good continu um x rays except for Al K x rays. This continuum source is useful as a calibration source for low energy x-ray detectors. (C) 1998 American Institute of Physics.