TEMPERATURE EFFECTS ON THE FABRICATION OF OPTICAL CHANNELS IN PLANAR GAAS ALGAAS WAVE-GUIDES USING MEV IONS/

Authors
TAYLOR T ILA D ZIMMERMAN RL COCHRANE JC ASHLEY PR POKER DB HENSLEY DK
Citation
T. Taylor et al., TEMPERATURE EFFECTS ON THE FABRICATION OF OPTICAL CHANNELS IN PLANAR GAAS ALGAAS WAVE-GUIDES USING MEV IONS/, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 141(1-4), 1998, pp. 704-708
Citations number
6
Categorie Soggetti
Instument & Instrumentation","Nuclear Sciences & Tecnology","Physics, Atomic, Molecular & Chemical","Physics, Nuclear
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
141
Issue
1-4
Year of publication
1998
Pages
704 - 708
Database
ISI
SICI code
0168-583X(1998)141:1-4<704:TEOTFO>2.0.ZU;2-A
Abstract
We have fabricated optical channels in selectively masked planar GaAs/ AlGaAs waveguide structures using both 10 MeV oxygen and 8 MeV carbon ions. Implantation at different temperatures appears to have a direct effect on the extracted propagation mode losses. Single-mode operation was observed from all the fabricated optical channels at a wavelength of 1.3 mu m. The optical characterization results provide insight as to which ion beam parameters are best suited to optimize this fabricat ion process. (C) 1998 Elsevier Science B.V. All rights reserved.