MICROSTRUCTURE OF COLUMNAR-GRAINED SRTIO3 AND BATIO3 THIN-FILMS PREPARED BY CHEMICAL SOLUTION DEPOSITION

The microstructure and lattice defects of SrTiO3 and BaTiO3 thin films with columnar grains prepared by a chemical solution deposition techn ique have been investigated by means of transmission electron microsco py. The columnar grains in the SrTiO3 films exhibit a preferential ori entation with a crystallographic [111] direction parallel to the norma l of film, which, in turn, follows the orientation texture of the subs trate Pt layer. Cubic-to-cubic relationships have been found for the t wo materials. For the BaTiO3 films the columnar grains are oriented in a random way without any preferential relationship to the substrate P t layer. Pores, lattice defects, and grain boundaries occur in either type of film, however in different configurations, This reflects the i ndividual nature of the materials and the different formation and grow th mechanisms of the films under the preparation conditions.