Using X-ray diffractometry and spectral measurements, the structure an
d properties of graded Xray optical elements have been examined. Exper
imental and theoretical data on X-ray supermirrors, which were prepare
d by the magnetron sputtering technique using precise thickness contro
l, are reported. Measurements on graded aperiodic Si1-xGex single crys
tals, which were grown by the Czochralski technique, are also presente
d. The lattice parameter of such a crystal changes almost linearly wit
h increasing Ge concentration. The measurements indicate that Si1-xGex
crystals with concentrations up to 7 at.% Ge can be grown with a qual
ity comparable to that of pure Si crystals.