3-DIMENSIONAL TOMOGRAPHY USING A SOFT-X-RAY HOLOGRAPHIC MICROSCOPE AND CCD CAMERA

The depth resolution of a soft X-ray hologram is much worse than its t ransverse resolution because a single soft X-ray hologram has a small numerical aperture. To obtain a three-dimensional image, in-line holog rams of a specimen were recorded from various directions and reconstru cted to obtain two-dimensional projection data. Then, a three-dimensio nal reconstruction was performed by back-projection of these reconstru cted holograms. Three-dimensional images of a tungsten wire of diamete r 10 mu m and a fossil of a diatom were obtained.