IMAGING X-RAY-FLUORESCENCE MICROSCOPE WITH A WOLTER-TYPE GRAZING-INCIDENCE MIRROR

A Welter-type grazing-incidence mirror was used as an objective for an imaging X-ray fluorescence microscope. The microscope was constructed at the beamline 6C2 of the Photon Factory. The shortest wavelength us ed was similar to 0.1 nm, which was limited by the grazing-incidence a ngle of the mirror. To demonstrate the possibility of recording X-ray fluorescence images, several fine grids were used as test specimens. C haracteristic X-rays emitted from each specimen could be clearly image d. Spatial resolution was estimated to be better than 10 mu m.