DESIGN OF BEAMLINE OPTICS FOR EUVL

Authors
WATANABE T HAGA T NIIBE M KINOSHITA H
Citation
T. Watanabe et al., DESIGN OF BEAMLINE OPTICS FOR EUVL, Journal of synchrotron radiation, 5, 1998, pp. 1149-1152
Citations number
11
Categorie Soggetti
Instument & Instrumentation","Physics, Applied",Optics
Journal title
Journal of synchrotron radiation → ACNP
ISSN journal
09090495
Volume
5
Year of publication
1998
Part
3
Pages
1149 - 1152
Database
ISI
SICI code
0909-0495(1998)5:<1149:DOBOFE>2.0.ZU;2-5
Abstract
The design of front-end collimating optics for extreme-ultraviolet lit hography (EUVL) is reported. For EUVL, collimating optics consisting o f a concave toroidal mirror and a convex toroidal mirror can achieve s horter optical path lengths than collimating optics consisting of two concave toroidal mirrors. Collimating optics consisting of a concave t oroidal mirror and a convex toroidal mirror are discussed. The design of collimating optics for EUVL beamlines based on ray-tracing studies is described.